Home > Publications database > Influence of dry etching using argon on structural and electrical properties of crystalline and non-crystalline SrBi2Ta2O9
 
Journal Article PreJuSER-37162
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Influence of dry etching using argon on structural and electrical properties of crystalline and non-crystalline SrBi2Ta2O9

 ;  ;  ;  ;  ;  ;  ;

1999
Taylor & Francis London [u.a.]

Integrated ferroelectrics 27, ()

Classification:

Note: Record converted from VDB: 12.11.2012
Contributing Institute(s):
  1. Institut für Festkörperforschung (IFF)
Research Program(s):
  1. Festkörperforschung für die Informationstechnik (23.42.0)

Appears in the scientific report 1999
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 Record created 2012-11-13, last modified 2017-06-01
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