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@ARTICLE{Wellmann:1008190,
      author       = {Wellmann, Peter J. and Steiner, Johannes and Strüber, Sven
                      and Arzig, Matthias and Salamon, Michael and Uhlmann, Norman
                      and Nguyen, Binh Duong and Sandfeld, Stefan},
      title        = {{T}he processing chain of the wide bandgap semiconductor
                      {S}i{C} – {H}ow small steps enabled a mature technology},
      journal      = {Diamond and related materials},
      volume       = {136},
      issn         = {0925-9635},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {FZJ-2023-02236},
      pages        = {109895 -},
      year         = {2023},
      abstract     = {This work paper was presented as a keynote lecture at the
                      international conference on diamond and related materials in
                      Lisbon (Portugal) in the year 2022. This paper summarizes in
                      the first part the processing chain of the semiconductor
                      material SiC from the raw material to epitaxially-ready
                      wafers as they are used for electronic device manufacturing.
                      In the second part a current research study, the reduction
                      of the basal plane dislocation density in SiC crystal growth
                      is presented. Among other defects, basal plane dislocations
                      belong to the more severe structural defects in SiC with
                      respect to degradation during electronic device operation.
                      In the third part the applicability of X-ray topography to
                      reveal dislocations and other structural defects in SiC is
                      outlined in a review style.},
      cin          = {IAS-9},
      ddc          = {670},
      cid          = {I:(DE-Juel1)IAS-9-20201008},
      pnm          = {5111 - Domain-Specific Simulation $\&$ Data Life Cycle Labs
                      (SDLs) and Research Groups (POF4-511)},
      pid          = {G:(DE-HGF)POF4-5111},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000976520900001},
      doi          = {10.1016/j.diamond.2023.109895},
      url          = {https://juser.fz-juelich.de/record/1008190},
}