%0 Journal Article
%A Peters, Lukas
%A Sergeev, Dmitry
%A Margenfeld, Christoph
%A Müller, Michael
%A Waag, Andreas
%T Sublimation behavior of AlN in nitrogen and argon at conditions used for high-temperature annealing
%J Journal of applied physics
%V 133
%N 23
%@ 0021-8979
%C Melville, NY
%I American Inst. of Physics
%M FZJ-2023-02410
%P 235704
%D 2023
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001016600100002
%R 10.1063/5.0152054
%U https://juser.fz-juelich.de/record/1008577