| Home > Publications database > Sublimation behavior of AlN in nitrogen and argon at conditions used for high-temperature annealing |
| Journal Article | FZJ-2023-02410 |
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2023
American Inst. of Physics
Melville, NY
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Please use a persistent id in citations: doi:10.1063/5.0152054 doi:10.34734/FZJ-2023-02410
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