TY  - JOUR
AU  - Peters, Lukas
AU  - Sergeev, Dmitry
AU  - Margenfeld, Christoph
AU  - Müller, Michael
AU  - Waag, Andreas
TI  - Sublimation behavior of AlN in nitrogen and argon at conditions used for high-temperature annealing
JO  - Journal of applied physics
VL  - 133
IS  - 23
SN  - 0021-8979
CY  - Melville, NY
PB  - American Inst. of Physics
M1  - FZJ-2023-02410
SP  - 235704
PY  - 2023
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001016600100002
DO  - DOI:10.1063/5.0152054
UR  - https://juser.fz-juelich.de/record/1008577
ER  -