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100 1 _ |a Peters, Lukas
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245 _ _ |a Sublimation behavior of AlN in nitrogen and argon at conditions used for high-temperature annealing
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700 1 _ |a Margenfeld, Christoph
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700 1 _ |a Müller, Michael
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700 1 _ |a Waag, Andreas
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773 _ _ |a 10.1063/5.0152054
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