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@ARTICLE{Fischer:1017132,
author = {Fischer, Benedikt and Lambertz, Andreas and Nuys, Maurice
and Beyer, Wolfhard and Duan, Weiyuan and Bittkau, Karsten
and Ding, Kaining and Rau, Uwe},
title = {{I}nsights into the {S}i─{H} {B}onding {C}onfiguration at
the {A}morphous/{C}rystalline {S}ilicon {I}nterface of
{S}ilicon {H}eterojunction {S}olar {C}ells by {R}aman and
{FTIR} {S}pectroscopy},
journal = {Advanced materials},
volume = {35},
number = {47},
issn = {0935-9648},
address = {Weinheim},
publisher = {Wiley-VCH},
reportid = {FZJ-2023-03953},
pages = {2306351},
year = {2023},
abstract = {In silicon heterojunction solar cell technology, thin
layers of hydrogenated amorphous silicon (a-Si:H) are
applied as passivating contacts to the crystalline silicon
(c-Si) wafer. Thus, the properties of the a-Si:H is crucial
for the performance of the solar cells. One important
property of a-Si:H is its microstructure which can be
characterized by the microstructure parameter R based on
Si─H bond stretching vibrations. A common method to
determine R is Fourier transform infrared (FTIR) absorption
measurement which, however, is difficult to perform on solar
cells for various reasons like the use of textured Si wafers
and the presence of conducting oxide contact layers. Here,
it is demonstrated that Raman spectroscopy is suitable to
determine the microstructure of bulk a-Si:H layers of 10 nm
or less on textured c-Si underneath indium tin oxide as
conducting oxide. A detailed comparison of FTIR and Raman
spectra is performed and significant differences in the
microstructure parameter are obtained by both methods with
decreasing a-Si:H film thickness.},
cin = {IEK-5},
ddc = {660},
cid = {I:(DE-Juel1)IEK-5-20101013},
pnm = {1212 - Materials and Interfaces (POF4-121)},
pid = {G:(DE-HGF)POF4-1212},
typ = {PUB:(DE-HGF)16},
pubmed = {37708374},
UT = {WOS:001083113400001},
doi = {10.1002/adma.202306351},
url = {https://juser.fz-juelich.de/record/1017132},
}