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%0 Journal Article %A Sackers, M. %A Marchuk, O. %A Ertmer, S. %A Brezinsek, S. %A Kreter, A. %T Space-resolved line shape model for sputtered atoms of finite-size targets %J Physica scripta %V 98 %N 11 %@ 0031-8949 %C Stockholm %I The Royal Swedish Academy of Sciences %M FZJ-2023-04028 %P 115603 - %D 2023 %F PUB:(DE-HGF)16 %9 Journal Article %U <Go to ISI:>//WOS:001080785400001 %R 10.1088/1402-4896/acfe4a %U https://juser.fz-juelich.de/record/1017217