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TY - JOUR AU - Sackers, M. AU - Marchuk, O. AU - Ertmer, S. AU - Brezinsek, S. AU - Kreter, A. TI - Space-resolved line shape model for sputtered atoms of finite-size targets JO - Physica scripta VL - 98 IS - 11 SN - 0031-8949 CY - Stockholm PB - The Royal Swedish Academy of Sciences M1 - FZJ-2023-04028 SP - 115603 - PY - 2023 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:001080785400001 DO - DOI:10.1088/1402-4896/acfe4a UR - https://juser.fz-juelich.de/record/1017217 ER -