%0 Thesis
%A Qiu, Depeng
%T Development of industry-scalable processes for nanocrystalline silicon oxide in silicon heterojunction solar cells
%V 619
%I RWTH Aachen University
%V Dissertation
%C Jülich
%M FZJ-2024-00601
%@ 978-3-95806-734-9
%B Schriften des Forschungszentrums Jülich Reihe Energie & Umwelt / Energy & Environment
%D 2023
%Z Dissertation, RWTH Aachen University, 2023
%X Thanks to the excellent passivation of hydrogenated amorphous silicon (a-Si:H) to wafer surface, high open circuit voltage (Voc) as well as power conversion efficiency (η) have been achieved by the silicon heterojunction (SHJ) solar cell technology in the recent decades. However, a significant parasitic absorption in doped a-Si:H results in a low short circuit current density (Jsc), limiting the cell performance of SHJ solar cells. Doped hydrogenated nanocrystalline silicon oxide (nc-SiOx:H), consisting of conductive silicon crystallites (nc-Si:H) embedded in transparent hydrogenated morphous silicon oxide (a-SiOx:H) matrix, is an attractive alternative material to the commonly used a-Si:H in SHJ solar cells to further improve the cell performance. A trade-off between the optical and the electrical properties always need to be taken into account when applying the nc-SiOx:H(n) films in SHJ solar cells. The goal of this thesis is to systematically investigate the implementation of nc-SiOx:H(n) in SHJ solar cells, to find the correlation between the material properties and the device performance, and to demonstrate the industrial applicability of nc-SiOx:H in SHJ solar cells. 
%F PUB:(DE-HGF)3 ; PUB:(DE-HGF)11
%9 BookDissertation / PhD Thesis
%R 10.34734/FZJ-2024-00601
%U https://juser.fz-juelich.de/record/1021155