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005     20240712084519.0
020 _ _ |a 978-3-95806-734-9
024 7 _ |a 10.34734/FZJ-2024-00601
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037 _ _ |a FZJ-2024-00601
100 1 _ |a Qiu, Depeng
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|e Corresponding author
245 _ _ |a Development of industry-scalable processes for nanocrystalline silicon oxide in silicon heterojunction solar cells
260 _ _ |a Jülich
|c 2023
|b Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag
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336 7 _ |a DISSERTATION
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336 7 _ |a Thesis
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336 7 _ |a Dissertation / PhD Thesis
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490 0 _ |a Schriften des Forschungszentrums Jülich Reihe Energie & Umwelt / Energy & Environment
|v 619
502 _ _ |a Dissertation, RWTH Aachen University, 2023
|c RWTH Aachen University
|b Dissertation
|d 2023
520 _ _ |a Thanks to the excellent passivation of hydrogenated amorphous silicon (a-Si:H) to wafer surface, high open circuit voltage (Voc) as well as power conversion efficiency (η) have been achieved by the silicon heterojunction (SHJ) solar cell technology in the recent decades. However, a significant parasitic absorption in doped a-Si:H results in a low short circuit current density (Jsc), limiting the cell performance of SHJ solar cells. Doped hydrogenated nanocrystalline silicon oxide (nc-SiOx:H), consisting of conductive silicon crystallites (nc-Si:H) embedded in transparent hydrogenated morphous silicon oxide (a-SiOx:H) matrix, is an attractive alternative material to the commonly used a-Si:H in SHJ solar cells to further improve the cell performance. A trade-off between the optical and the electrical properties always need to be taken into account when applying the nc-SiOx:H(n) films in SHJ solar cells. The goal of this thesis is to systematically investigate the implementation of nc-SiOx:H(n) in SHJ solar cells, to find the correlation between the material properties and the device performance, and to demonstrate the industrial applicability of nc-SiOx:H in SHJ solar cells.
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