%0 Journal Article
%A Han, Yi
%A Sun, Jingxuan
%A Radu, Ionut
%A Knoch, Joachim
%A Grützmacher, Detlev
%A Zhao, Qing-Tai
%T Improved performance of FDSOI FETs at cryogenic temperatures by optimizing ion implantation into silicide
%J Solid state electronics
%V 208
%@ 0038-1101
%C Oxford [u.a.]
%I Pergamon, Elsevier Science
%M FZJ-2024-01002
%P 108733 -
%D 2023
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001080060700001
%R 10.1016/j.sse.2023.108733
%U https://juser.fz-juelich.de/record/1021853