TY  - JOUR
AU  - Han, Yi
AU  - Sun, Jingxuan
AU  - Radu, Ionut
AU  - Knoch, Joachim
AU  - Grützmacher, Detlev
AU  - Zhao, Qing-Tai
TI  - Improved performance of FDSOI FETs at cryogenic temperatures by optimizing ion implantation into silicide
JO  - Solid state electronics
VL  - 208
SN  - 0038-1101
CY  - Oxford [u.a.]
PB  - Pergamon, Elsevier Science
M1  - FZJ-2024-01002
SP  - 108733 -
PY  - 2023
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001080060700001
DO  - DOI:10.1016/j.sse.2023.108733
UR  - https://juser.fz-juelich.de/record/1021853
ER  -