%0 Journal Article
%A Berg, Fenja
%A Kopperberg, Nils
%A Lübben, Jan
%A Valov, Ilia
%A Wu, Xiaochao
%A Simon, Ulrich
%A Böttger, Ulrich
%T Influence of moisture on the ferroelectric properties of sputtered hafnium oxide thin films
%J Journal of applied physics
%V 134
%N 18
%@ 0021-8979
%C Melville, NY
%I American Inst. of Physics
%M FZJ-2024-01440
%P 185106
%D 2023
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001104188500001
%R 10.1063/5.0171345
%U https://juser.fz-juelich.de/record/1022323