Home > Publications database > Influence of moisture on the ferroelectric properties of sputtered hafnium oxide thin films |
Journal Article | FZJ-2024-01440 |
; ; ; ; ; ;
2023
American Inst. of Physics
Melville, NY
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Please use a persistent id in citations: doi:10.1063/5.0171345 doi:10.34734/FZJ-2024-01440
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