TY  - JOUR
AU  - Berg, Fenja
AU  - Kopperberg, Nils
AU  - Lübben, Jan
AU  - Valov, Ilia
AU  - Wu, Xiaochao
AU  - Simon, Ulrich
AU  - Böttger, Ulrich
TI  - Influence of moisture on the ferroelectric properties of sputtered hafnium oxide thin films
JO  - Journal of applied physics
VL  - 134
IS  - 18
SN  - 0021-8979
CY  - Melville, NY
PB  - American Inst. of Physics
M1  - FZJ-2024-01440
SP  - 185106
PY  - 2023
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001104188500001
DO  - DOI:10.1063/5.0171345
UR  - https://juser.fz-juelich.de/record/1022323
ER  -