% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@ARTICLE{Berg:1022323,
      author       = {Berg, Fenja and Kopperberg, Nils and Lübben, Jan and
                      Valov, Ilia and Wu, Xiaochao and Simon, Ulrich and Böttger,
                      Ulrich},
      title        = {{I}nfluence of moisture on the ferroelectric properties of
                      sputtered hafnium oxide thin films},
      journal      = {Journal of applied physics},
      volume       = {134},
      number       = {18},
      issn         = {0021-8979},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2024-01440},
      pages        = {185106},
      year         = {2023},
      cin          = {PGI-7 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {5233 - Memristive Materials and Devices (POF4-523)},
      pid          = {G:(DE-HGF)POF4-5233},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:001104188500001},
      doi          = {10.1063/5.0171345},
      url          = {https://juser.fz-juelich.de/record/1022323},
}