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100 1 _ |a Berg, Fenja
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245 _ _ |a Influence of moisture on the ferroelectric properties of sputtered hafnium oxide thin films
260 _ _ |a Melville, NY
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700 1 _ |a Kopperberg, Nils
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700 1 _ |a Lübben, Jan
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700 1 _ |a Valov, Ilia
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700 1 _ |a Wu, Xiaochao
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700 1 _ |a Simon, Ulrich
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700 1 _ |a Böttger, Ulrich
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773 _ _ |a 10.1063/5.0171345
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