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@ARTICLE{Magalhes:1023074,
author = {Magalhães, S. and Cabaço, J. S. and Concepción, O. and
Buca, D. and Stachowicz, M. and Oliveira, F. and Cerqueira,
M. F. and Lorenz, K. and Alves, E.},
title = {{C}ombining x-ray real and reciprocal space mapping
techniques to explore the epitaxial growth of
semiconductors},
journal = {Journal of physics / D},
volume = {56},
number = {24},
issn = {0508-3443},
address = {Bristol},
publisher = {IOP Publ.},
reportid = {FZJ-2024-01647},
pages = {245102 -},
year = {2023},
abstract = {In the present work, the importance of determining the
strain states of semiconductor compounds with high accuracy
is demonstrated. For the matter in question, new software
titled LAPAs, the acronym for LAttice PArameters is
presented. The lattice parameters as well as the chemical
composition of Al1−xInxN and Ge1−xSnx compounds grown on
top of GaN- and Ge- buffered c-Al2O3 and (001) oriented Si
substrates, respectively, are calculated via the real space
Bond’s method. The uncertainties in the lattice parameters
and composition are derived, compared and discussed with the
ones found via x-ray diffraction reciprocal space mapping.
Broad peaks lead to increased centroid uncertainty and are
found to constitute up to $99\%$ of the total uncertainty in
the lattice parameters. Refraction correction is included in
the calculations and found to have an impact of 0.001 Å in
the lattice parameters of both hexagonal and cubic
crystallographic systems and below $0.01\%$ in the
quantification of the InN and Sn contents. Although the
relaxation degrees of the nitride and tin compounds agree
perfectly between the real and reciprocal-spaces methods,
the uncertainty in the latter is found to be ten times
higher. The impact of the findings may be substantial for
the development of applications and devices as the intervals
found for the lattice match the condition of Al1−xInxN
grown on GaN templates vary between $∼1.8\%$
(0.1675–0.1859) and $0.04\%$ (0.1708–0.1712) if derived
via the real- and reciprocal spaces methods.},
cin = {PGI-9 / PTJ-ESN},
ddc = {530},
cid = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)PTJ-ESN-20160331},
pnm = {5234 - Emerging NC Architectures (POF4-523)},
pid = {G:(DE-HGF)POF4-5234},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000970634100001},
doi = {10.1088/1361-6463/acc597},
url = {https://juser.fz-juelich.de/record/1023074},
}