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@INPROCEEDINGS{Brackmann:1023794,
      author       = {Brackmann, Varvara and Neul, Malte and Friedrich, Michael
                      and Langheinrich, Wolfram and Simon, Maik and Muster, Pascal
                      and Pregl, Sebastian and Demmler, Arne and Hanisch, Norbert
                      and Lederer, Maximilian and Zimmermann, Katrin and Klos, Jan
                      and Reichmann, Felix and Yamamoto, Yuji and Wislicenus,
                      Marcus and Dahl, Claus and Schreiber, Lars R. and Bluhm,
                      Hendrik and Lilienthal-Uhlig, Benjamin},
      editor       = {Behringer, Uwe F. and Loeschner, Hans and Finders, Jo},
      title        = {{F}abrication of gate electrodes for scalable quantum
                      computing using {CMOS} industry compatible e-beam
                      lithography and numerical simulation of the resulting
                      quantum device},
      publisher    = {SPIE},
      reportid     = {FZJ-2024-01807},
      pages        = {1-10},
      year         = {2023},
      comment      = {38th European Mask and Lithography Conference (EMLC 2023) :
                      [Proceedings] - SPIE, 2023. - ISBN
                      97815106686079781510668614 - doi:10.1117/12.2675943},
      booktitle     = {38th European Mask and Lithography
                       Conference (EMLC 2023) : [Proceedings]
                       - SPIE, 2023. - ISBN
                       97815106686079781510668614 -
                       doi:10.1117/12.2675943},
      month         = {Jun},
      date          = {2023-06-19},
      organization  = {38th European Mask and Lithography
                       Conference, Dresden (Germany), 19 Jun
                       2023 - 21 Jun 2023},
      cin          = {PGI-11},
      cid          = {I:(DE-Juel1)PGI-11-20170113},
      pnm          = {5221 - Advanced Solid-State Qubits and Qubit Systems
                      (POF4-522)},
      pid          = {G:(DE-HGF)POF4-5221},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      doi          = {10.1117/12.2675943},
      url          = {https://juser.fz-juelich.de/record/1023794},
}