| 001 | 1023794 | ||
| 005 | 20250203103457.0 | ||
| 024 | 7 | _ | |a 10.1117/12.2675943 |2 doi |
| 037 | _ | _ | |a FZJ-2024-01807 |
| 100 | 1 | _ | |a Brackmann, Varvara |0 P:(DE-HGF)0 |b 0 |
| 111 | 2 | _ | |a 38th European Mask and Lithography Conference |c Dresden |d 2023-06-19 - 2023-06-21 |w Germany |
| 245 | _ | _ | |a Fabrication of gate electrodes for scalable quantum computing using CMOS industry compatible e-beam lithography and numerical simulation of the resulting quantum device |
| 260 | _ | _ | |c 2023 |b SPIE |
| 295 | 1 | 0 | |a 38th European Mask and Lithography Conference (EMLC 2023) : [Proceedings] - SPIE, 2023. - ISBN 97815106686079781510668614 - doi:10.1117/12.2675943 |
| 300 | _ | _ | |a 1-10 |
| 336 | 7 | _ | |a CONFERENCE_PAPER |2 ORCID |
| 336 | 7 | _ | |a Conference Paper |0 33 |2 EndNote |
| 336 | 7 | _ | |a INPROCEEDINGS |2 BibTeX |
| 336 | 7 | _ | |a conferenceObject |2 DRIVER |
| 336 | 7 | _ | |a Output Types/Conference Paper |2 DataCite |
| 336 | 7 | _ | |a Contribution to a conference proceedings |b contrib |m contrib |0 PUB:(DE-HGF)8 |s 1709880463_2953 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Contribution to a book |0 PUB:(DE-HGF)7 |2 PUB:(DE-HGF) |m contb |
| 536 | _ | _ | |a 5221 - Advanced Solid-State Qubits and Qubit Systems (POF4-522) |0 G:(DE-HGF)POF4-5221 |c POF4-522 |f POF IV |x 0 |
| 588 | _ | _ | |a Dataset connected to CrossRef Conference |
| 700 | 1 | _ | |a Neul, Malte |0 P:(DE-HGF)0 |b 1 |
| 700 | 1 | _ | |a Friedrich, Michael |0 P:(DE-HGF)0 |b 2 |
| 700 | 1 | _ | |a Langheinrich, Wolfram |0 P:(DE-HGF)0 |b 3 |
| 700 | 1 | _ | |a Simon, Maik |0 P:(DE-HGF)0 |b 4 |
| 700 | 1 | _ | |a Muster, Pascal |0 P:(DE-HGF)0 |b 5 |
| 700 | 1 | _ | |a Pregl, Sebastian |0 P:(DE-HGF)0 |b 6 |
| 700 | 1 | _ | |a Demmler, Arne |0 P:(DE-HGF)0 |b 7 |
| 700 | 1 | _ | |a Hanisch, Norbert |0 P:(DE-HGF)0 |b 8 |
| 700 | 1 | _ | |a Lederer, Maximilian |0 P:(DE-HGF)0 |b 9 |
| 700 | 1 | _ | |a Zimmermann, Katrin |0 P:(DE-HGF)0 |b 10 |
| 700 | 1 | _ | |a Klos, Jan |0 P:(DE-Juel1)195937 |b 11 |u fzj |
| 700 | 1 | _ | |a Reichmann, Felix |0 P:(DE-HGF)0 |b 12 |
| 700 | 1 | _ | |a Yamamoto, Yuji |0 P:(DE-HGF)0 |b 13 |
| 700 | 1 | _ | |a Wislicenus, Marcus |0 P:(DE-HGF)0 |b 14 |
| 700 | 1 | _ | |a Dahl, Claus |0 P:(DE-HGF)0 |b 15 |
| 700 | 1 | _ | |a Schreiber, Lars R. |0 P:(DE-Juel1)172641 |b 16 |e Corresponding author |u fzj |
| 700 | 1 | _ | |a Bluhm, Hendrik |0 P:(DE-Juel1)172019 |b 17 |u fzj |
| 700 | 1 | _ | |a Lilienthal-Uhlig, Benjamin |0 P:(DE-HGF)0 |b 18 |
| 700 | 1 | _ | |a Behringer, Uwe F. |0 P:(DE-HGF)0 |b 19 |e Editor |
| 700 | 1 | _ | |a Loeschner, Hans |0 P:(DE-HGF)0 |b 20 |e Editor |
| 700 | 1 | _ | |a Finders, Jo |0 P:(DE-HGF)0 |b 21 |e Editor |
| 773 | _ | _ | |a 10.1117/12.2675943 |
| 909 | C | O | |o oai:juser.fz-juelich.de:1023794 |p VDB |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 11 |6 P:(DE-Juel1)195937 |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 16 |6 P:(DE-Juel1)172641 |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 17 |6 P:(DE-Juel1)172019 |
| 913 | 1 | _ | |a DE-HGF |b Key Technologies |l Natural, Artificial and Cognitive Information Processing |1 G:(DE-HGF)POF4-520 |0 G:(DE-HGF)POF4-522 |3 G:(DE-HGF)POF4 |2 G:(DE-HGF)POF4-500 |4 G:(DE-HGF)POF |v Quantum Computing |9 G:(DE-HGF)POF4-5221 |x 0 |
| 914 | 1 | _ | |y 2024 |
| 920 | _ | _ | |l yes |
| 920 | 1 | _ | |0 I:(DE-Juel1)PGI-11-20170113 |k PGI-11 |l JARA Institut Quanteninformation |x 0 |
| 980 | _ | _ | |a contrib |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a contb |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-11-20170113 |
| 980 | _ | _ | |a UNRESTRICTED |
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