TY  - JOUR
AU  - Qiu, Depeng
AU  - Duan, Weiyuan
AU  - Lambertz, Andreas
AU  - Bittkau, Karsten
AU  - Rau, Uwe
AU  - Ding, Kaining
TI  - Synergetic Effect of Gas Compositions on Material Properties of n‐Type Nanocrystalline Silicon Oxide Prepared by Plasma‐Enhanced Chemical Vapor Deposition
JO  - Solar RRL
VL  - 8
IS  - 9
SN  - 2367-198X
CY  - Weinheim
PB  - Wiley-VCH
M1  - FZJ-2024-02193
SP  - 2400095
PY  - 2024
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001193252000001
DO  - DOI:10.1002/solr.202400095
UR  - https://juser.fz-juelich.de/record/1024472
ER  -