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@ARTICLE{Qiu:1024472,
      author       = {Qiu, Depeng and Duan, Weiyuan and Lambertz, Andreas and
                      Bittkau, Karsten and Rau, Uwe and Ding, Kaining},
      title        = {{S}ynergetic {E}ffect of {G}as {C}ompositions on {M}aterial
                      {P}roperties of n‐{T}ype {N}anocrystalline {S}ilicon
                      {O}xide {P}repared by {P}lasma‐{E}nhanced {C}hemical
                      {V}apor {D}eposition},
      journal      = {Solar RRL},
      volume       = {8},
      number       = {9},
      issn         = {2367-198X},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {FZJ-2024-02193},
      pages        = {2400095},
      year         = {2024},
      cin          = {IEK-5},
      ddc          = {600},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {1213 - Cell Design and Development (POF4-121)},
      pid          = {G:(DE-HGF)POF4-1213},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:001193252000001},
      doi          = {10.1002/solr.202400095},
      url          = {https://juser.fz-juelich.de/record/1024472},
}