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| Home > Publications database > Fabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon Nitride as Alternative to Impurity Doping > Access to Fulltext |
| Home > Publications database > Fabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon Nitride as Alternative to Impurity Doping > Access to Fulltext |
 FabricationofUltrasmallSiEncapsulatedinSiliconDioxideandSiliconNitride_v02
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 Physica Status Solidi a - 2023 - Frentzen - Fabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon
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