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@ARTICLE{Mikulics:1025717,
      author       = {Mikulics, Martin and Winden, Andreas and Mayer, Joachim and
                      Hardtdegen, Hilde},
      title        = {{D}evelopments in {M}ask-{F}ree {S}ingularly {A}ddressable
                      {N}ano-{LED} {L}ithography},
      journal      = {Nanomanufacturing},
      volume       = {4},
      number       = {2},
      issn         = {2673-687X},
      address      = {Basel, Switzerland},
      publisher    = {MDPI},
      reportid     = {FZJ-2024-03100},
      pages        = {99-110},
      year         = {2024},
      abstract     = {LED devices are increasingly gaining importance in
                      lithography approaches due to the fact that they can be used
                      flexibly for mask-less patterning. In this study, we briefly
                      report on developments in mask-free lithography approaches
                      based on nano-LED devices and summarize our current
                      achievements in the different building blocks needed for its
                      application. Individually addressable nano-LED structures
                      can form the basis for an unprecedented fast and flexible
                      patterning, on demand, in photo-chemically sensitive films.
                      We introduce a driving scheme for nano-LEDs in arrays
                      serving for a singularly addressable approach. Furthermore,
                      we discuss the challenges facing nano-LED fabrication and
                      possibilities to improve their performance. Additionally, we
                      introduce LED structures based on a hybrid
                      nanocrystal/nano-LED approach. Lastly, we provide an outlook
                      how this approach could further develop for next generation
                      lithography systems. This technique has a huge potential to
                      revolutionize the field and to contribute significantly to
                      energy and resources saving device nanomanufacturing.},
      cin          = {ER-C-2},
      ddc          = {600},
      cid          = {I:(DE-Juel1)ER-C-2-20170209},
      pnm          = {5353 - Understanding the Structural and Functional Behavior
                      of Solid State Systems (POF4-535)},
      pid          = {G:(DE-HGF)POF4-5353},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.3390/nanomanufacturing4020007},
      url          = {https://juser.fz-juelich.de/record/1025717},
}