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| 001 | 1025717 | ||
| 005 | 20240516205741.0 | ||
| 024 | 7 | _ | |a 10.3390/nanomanufacturing4020007 |2 doi |
| 024 | 7 | _ | |a 10.34734/FZJ-2024-03100 |2 datacite_doi |
| 037 | _ | _ | |a FZJ-2024-03100 |
| 041 | _ | _ | |a English |
| 082 | _ | _ | |a 600 |
| 100 | 1 | _ | |a Mikulics, Martin |0 P:(DE-Juel1)128613 |b 0 |e Corresponding author |
| 245 | _ | _ | |a Developments in Mask-Free Singularly Addressable Nano-LED Lithography |
| 260 | _ | _ | |a Basel, Switzerland |c 2024 |b MDPI |
| 336 | 7 | _ | |a article |2 DRIVER |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1715843855_2587 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 520 | _ | _ | |a LED devices are increasingly gaining importance in lithography approaches due to the fact that they can be used flexibly for mask-less patterning. In this study, we briefly report on developments in mask-free lithography approaches based on nano-LED devices and summarize our current achievements in the different building blocks needed for its application. Individually addressable nano-LED structures can form the basis for an unprecedented fast and flexible patterning, on demand, in photo-chemically sensitive films. We introduce a driving scheme for nano-LEDs in arrays serving for a singularly addressable approach. Furthermore, we discuss the challenges facing nano-LED fabrication and possibilities to improve their performance. Additionally, we introduce LED structures based on a hybrid nanocrystal/nano-LED approach. Lastly, we provide an outlook how this approach could further develop for next generation lithography systems. This technique has a huge potential to revolutionize the field and to contribute significantly to energy and resources saving device nanomanufacturing. |
| 536 | _ | _ | |a 5353 - Understanding the Structural and Functional Behavior of Solid State Systems (POF4-535) |0 G:(DE-HGF)POF4-5353 |c POF4-535 |f POF IV |x 0 |
| 588 | _ | _ | |a Dataset connected to CrossRef, Journals: juser.fz-juelich.de |
| 700 | 1 | _ | |a Winden, Andreas |0 P:(DE-HGF)0 |b 1 |
| 700 | 1 | _ | |a Mayer, Joachim |0 P:(DE-Juel1)130824 |b 2 |
| 700 | 1 | _ | |a Hardtdegen, Hilde |0 P:(DE-Juel1)125593 |b 3 |e Corresponding author |
| 773 | _ | _ | |a 10.3390/nanomanufacturing4020007 |g Vol. 4, no. 2, p. 99 - 110 |0 PERI:(DE-600)3136586-3 |n 2 |p 99-110 |t Nanomanufacturing |v 4 |y 2024 |x 2673-687X |
| 856 | 4 | _ | |y OpenAccess |u https://juser.fz-juelich.de/record/1025717/files/nanomanufacturing-04-00007.pdf |
| 856 | 4 | _ | |y OpenAccess |x icon |u https://juser.fz-juelich.de/record/1025717/files/nanomanufacturing-04-00007.gif?subformat=icon |
| 856 | 4 | _ | |y OpenAccess |x icon-1440 |u https://juser.fz-juelich.de/record/1025717/files/nanomanufacturing-04-00007.jpg?subformat=icon-1440 |
| 856 | 4 | _ | |y OpenAccess |x icon-180 |u https://juser.fz-juelich.de/record/1025717/files/nanomanufacturing-04-00007.jpg?subformat=icon-180 |
| 856 | 4 | _ | |y OpenAccess |x icon-640 |u https://juser.fz-juelich.de/record/1025717/files/nanomanufacturing-04-00007.jpg?subformat=icon-640 |
| 909 | C | O | |o oai:juser.fz-juelich.de:1025717 |p openaire |p open_access |p VDB |p driver |p dnbdelivery |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 0 |6 P:(DE-Juel1)128613 |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 2 |6 P:(DE-Juel1)130824 |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 3 |6 P:(DE-Juel1)125593 |
| 913 | 1 | _ | |a DE-HGF |b Key Technologies |l Materials Systems Engineering |1 G:(DE-HGF)POF4-530 |0 G:(DE-HGF)POF4-535 |3 G:(DE-HGF)POF4 |2 G:(DE-HGF)POF4-500 |4 G:(DE-HGF)POF |v Materials Information Discovery |9 G:(DE-HGF)POF4-5353 |x 0 |
| 914 | 1 | _ | |y 2024 |
| 915 | _ | _ | |a OpenAccess |0 StatID:(DE-HGF)0510 |2 StatID |
| 915 | _ | _ | |a Creative Commons Attribution CC BY 4.0 |0 LIC:(DE-HGF)CCBY4 |2 HGFVOC |
| 920 | _ | _ | |l yes |
| 920 | 1 | _ | |0 I:(DE-Juel1)ER-C-2-20170209 |k ER-C-2 |l Materialwissenschaft u. Werkstofftechnik |x 0 |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a UNRESTRICTED |
| 980 | _ | _ | |a I:(DE-Juel1)ER-C-2-20170209 |
| 980 | 1 | _ | |a FullTexts |
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