% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@ARTICLE{Smart:1032290,
      author       = {Smart, Thomas and Kim, Dong Yeong and Braun, Wolfgang},
      title        = {{T}win-free thermal laser epitaxy of {S}i on sapphire},
      journal      = {Journal of vacuum science $\&$ technology / B},
      volume       = {42},
      number       = {6},
      issn         = {2166-2746},
      address      = {New York, NY},
      publisher    = {AIP Publishing},
      reportid     = {FZJ-2024-06129},
      pages        = {062204},
      year         = {2024},
      abstract     = {The heteroepitaxial growth of silicon (Si) is essential for
                      modern electronics. Our study investigates the potential of
                      thermal laser epitaxy (TLE) for Si epitaxy. A systematic
                      study on the evaporation behavior of Si during TLE
                      identifies and addresses the causes of notable flux rate
                      fluctuations, resulting in a Si flux with $0.3\%$ stability
                      over time. We also demonstrate heteroepitaxy of Si on -plane
                      sapphire substrates via TLE. High-temperature substrate
                      preparation combined with deposition at a substrate
                      temperature of 1000  C produced high-quality epitaxial Si
                      (111) films without twin domains.},
      cin          = {PGI-9},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {5221 - Advanced Solid-State Qubits and Qubit Systems
                      (POF4-522)},
      pid          = {G:(DE-HGF)POF4-5221},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:001341143700001},
      doi          = {10.1116/6.0003945},
      url          = {https://juser.fz-juelich.de/record/1032290},
}