TY  - JOUR
AU  - Dehury, Taranga
AU  - Kumar, Sandeep
AU  - Pütter, Sabine
AU  - Roy, Suman
AU  - Sahoo, Satyaprakash
AU  - Rath, Chandana
TI  - Volatile resistive switching characteristics of molecular beam epitaxy grown HfO2 thin films
JO  - Applied surface science
VL  - 685
SN  - 0169-4332
CY  - Amsterdam
PB  - Elsevier
M1  - FZJ-2025-00371
SP  - 162060 -
PY  - 2025
AB  - In this work, we have explored the structure, morphology and resistive switching aspects of molecular beamepitaxy grown HfO2 thin films fabricated on highly doped p-type Si substrate at substrate temperatures of 300and 500 ◦C. Both films correspond to the monoclinic phase (P21/c) of HfO2 and exhibit single crystallinestructure with a preferred orientation along (111). The density of the HfO2 layer is found to be 9.1 and 9.2 g/cm3,whereas the root mean square roughness is 1.3 and 2.4 nm in the films grown at 300 and 500 ◦C, respectively.Both films have an average grain size of ~ 140 nm. These HfO2 films demonstrate forming free volatile resistiveswitching behavior with SET voltage of − 3.1 and − 3.6 V, along with the ON/OFF ratio of ~ 2 and ~ 4 for thefilms deposited at substrate temperatures of 300 and 500 ◦C, respectively. For the films grown at 300 ◦C and500 ◦C, the retention time is found to be 20 and 30 s, respectively. Memory device based on HfO2 film withhigher substrate temperature exhibits a better ON/OFF ratio due to higher crystallinity and the availability ofmore oxygen vacancies. A comprehensive mechanism of resistive switching is also discussed in this article,considering the transport of oxygen vacancies and the electromigration of Ag ions.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001389098600001
DO  - DOI:10.1016/j.apsusc.2024.162060
UR  - https://juser.fz-juelich.de/record/1035313
ER  -