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@ARTICLE{Dehury:1035313,
author = {Dehury, Taranga and Kumar, Sandeep and Pütter, Sabine and
Roy, Suman and Sahoo, Satyaprakash and Rath, Chandana},
title = {{V}olatile resistive switching characteristics of molecular
beam epitaxy grown {H}f{O}2 thin films},
journal = {Applied surface science},
volume = {685},
issn = {0169-4332},
address = {Amsterdam},
publisher = {Elsevier},
reportid = {FZJ-2025-00371},
pages = {162060 -},
year = {2025},
abstract = {In this work, we have explored the structure, morphology
and resistive switching aspects of molecular beamepitaxy
grown HfO2 thin films fabricated on highly doped p-type Si
substrate at substrate temperatures of 300and 500 ◦C. Both
films correspond to the monoclinic phase (P21/c) of HfO2 and
exhibit single crystallinestructure with a preferred
orientation along (111). The density of the HfO2 layer is
found to be 9.1 and 9.2 g/cm3,whereas the root mean square
roughness is 1.3 and 2.4 nm in the films grown at 300 and
500 ◦C, respectively.Both films have an average grain size
of ~ 140 nm. These HfO2 films demonstrate forming free
volatile resistiveswitching behavior with SET voltage of −
3.1 and − 3.6 V, along with the ON/OFF ratio of ~ 2 and ~
4 for thefilms deposited at substrate temperatures of 300
and 500 ◦C, respectively. For the films grown at 300 ◦C
and500 ◦C, the retention time is found to be 20 and 30 s,
respectively. Memory device based on HfO2 film withhigher
substrate temperature exhibits a better ON/OFF ratio due to
higher crystallinity and the availability ofmore oxygen
vacancies. A comprehensive mechanism of resistive switching
is also discussed in this article,considering the transport
of oxygen vacancies and the electromigration of Ag ions.},
cin = {JCNS-4 / JCNS-FRM-II / MLZ},
ddc = {660},
cid = {I:(DE-Juel1)JCNS-4-20201012 /
I:(DE-Juel1)JCNS-FRM-II-20110218 / I:(DE-588b)4597118-3},
pnm = {632 - Materials – Quantum, Complex and Functional
Materials (POF4-632) / 6G4 - Jülich Centre for Neutron
Research (JCNS) (FZJ) (POF4-6G4)},
pid = {G:(DE-HGF)POF4-632 / G:(DE-HGF)POF4-6G4},
experiment = {EXP:(DE-MLZ)MBE-MLZ-20151210},
typ = {PUB:(DE-HGF)16},
UT = {WOS:001389098600001},
doi = {10.1016/j.apsusc.2024.162060},
url = {https://juser.fz-juelich.de/record/1035313},
}