%0 Chart or Table
%A Justus Teller
%A Adur Reman Jalil
%A Florian Lentz
%A Detlev Grützmacher
%A Thomas Schäpers
%T Fabrication Optimization of Suspended Stencil Mask Lithography for Multi-Terminal Josephson Junctions
%M datapubs-17649475141531738921-13363733046748834898
%D 2025
%F PUB:(DE-HGF)32
%9 Dataset
%R 10.26165/juelich-data/7wrrrh
%U https://juser.fz-juelich.de/record/1051891