TY  - CHART
AU  - Justus Teller
AU  - Adur Reman Jalil
AU  - Florian Lentz
AU  - Detlev Grützmacher
AU  - Thomas Schäpers
TI  - Fabrication Optimization of Suspended Stencil Mask Lithography for Multi-Terminal Josephson Junctions
M1  - datapubs-17649475141531738921-13363733046748834898
PY  - 2025
LB  - PUB:(DE-HGF)32
DO  - DOI:10.26165/juelich-data/7wrrrh
UR  - https://juser.fz-juelich.de/record/1051891
ER  -