% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@MISC{Justus:1051891,
      author       = {Justus Teller and Adur Reman Jalil and Florian Lentz and
                      Detlev Grützmacher and Thomas Schäpers},
      title        = {{F}abrication {O}ptimization of {S}uspended {S}tencil
                      {M}ask {L}ithography for {M}ulti-{T}erminal {J}osephson
                      {J}unctions},
      reportid     = {datapubs-17649475141531738921-13363733046748834898},
      year         = {2025},
      cin          = {PGI-9},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {5222 - Exploratory Qubits (POF4-522)},
      pid          = {G:(DE-HGF)POF4-5222},
      typ          = {PUB:(DE-HGF)32},
      doi          = {10.26165/juelich-data/7wrrrh},
      url          = {https://juser.fz-juelich.de/record/1051891},
}