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@ARTICLE{Minamisawa:111883,
author = {Minamisawa, R.A. and Schmidt, M. and Knoll, L. and Buca, D.
and Zhao, Q.T. and Hartmann, J.-M. and Bourdelle, K.K. and
Mantl, S.},
title = {{H}ole {T}ransport in {S}trained {S}i0.5{G}e0.5
{QW}-{MOSFET}s with $\<110\>$ and $\<100\>$ {C}hannel
{O}rientations},
journal = {IEEE electron device letters},
volume = {33},
issn = {0741-3106},
address = {New York, NY},
publisher = {IEEE},
reportid = {PreJuSER-111883},
pages = {1105 - 1107},
year = {2012},
note = {Manuscript received April 9, 2012; accepted May 9, 2012.
Date of publication July 3, 2012; date of current version
July 20, 2012. This work was supported in part by the German
Federal Ministry of Education and Research via the
MEDEA+project DECISIF under Grant 2T104. The review of this
letter was arranged by Editor L. Selmi.},
abstract = {Hole velocity and mobility are extracted from quantum-well
(QW) biaxially strained Si0.5Ge0.5 channel
metal-oxide-semiconductor field-effect transistors (MOSFETs)
on silicon-on-insulator wafers. Devices have been fabricated
at sub-100-nm gate length with HfO2/TiN gate stacks. A
significant hole mobility enhancement over the strained Si
mobility curve is observed for QW MOSFETs. We also discuss
the relationship between velocity and mobility of the
strained SiGe channels with high Ge content for < 100 > and
< 110 > crystal directions. Whereas the mobility increases
by $18\%$ for < 100 > with respect to < 110 >, it translates
into a modest $8\%$ velocity increase.},
keywords = {J (WoSType)},
cin = {JARA-FIT / PGI-9},
ddc = {620},
cid = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-9-20110106},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Engineering, Electrical $\&$ Electronic},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000306923700003},
doi = {10.1109/LED.2012.2199958},
url = {https://juser.fz-juelich.de/record/111883},
}