Journal Article

PreJuSER-111883

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Hole Transport in Strained Si0.5Ge0.5 QW-MOSFETs with <110> and <100> Channel Orientations

Minamisawa, R. A.FZJ* ; Schmidt, M.FZJ* ; Knoll, L.FZJ* ; Buca, D.FZJ* ; Zhao, Q. T.FZJ* ; Hartmann, J.-M. ; Bourdelle, K. K. ; Mantl, S.FZJ*

2012
IEEE New York, NY

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Please use a persistent id in citations: doi:10.1109/LED.2012.2199958

Abstract: Hole velocity and mobility are extracted from quantum-well (QW) biaxially strained Si0.5Ge0.5 channel metal-oxide-semiconductor field-effect transistors (MOSFETs) on silicon-on-insulator wafers. Devices have been fabricated at sub-100-nm gate length with HfO2/TiN gate stacks. A significant hole mobility enhancement over the strained Si mobility curve is observed for QW MOSFETs. We also discuss the relationship between velocity and mobility of the strained SiGe channels with high Ge content for < 100 > and < 110 > crystal directions. Whereas the mobility increases by 18% for < 100 > with respect to < 110 >, it translates into a modest 8% velocity increase.

Keyword(s): J ; High-kappa (auto) ; mobility (auto) ; metal-oxide-semiconductor field-effect transistor (MOSFET) (auto) ; silicon-on-insulator (SOI) (auto) ; strained SiGe (auto) ; velocity (auto)

Note: Manuscript received April 9, 2012; accepted May 9, 2012. Date of publication July 3, 2012; date of current version July 20, 2012. This work was supported in part by the German Federal Ministry of Education and Research via the MEDEA+project DECISIF under Grant 2T104. The review of this letter was arranged by Editor L. Selmi.

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Contributing Institute(s):

1. Halbleiter-Nanoelektronik (PGI-9)
2. Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)

Research Program(s):

1. Grundlagen für zukünftige Informationstechnologien (P42)

Appears in the scientific report 2012

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Database coverage:
Current Contents - Life Sciences ; JCR ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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