%0 Conference Paper
%A Hoffmann-Eifert, S.
%T Atomic layer deposition of oxide thin films for non-volatile memory applications
%M PreJuSER-111896
%D 2012
%Z Record converted from VDB: 16.11.2012
%< DPG Frühjahrstagung
Y2 25 Mar 2012
M2 Berlin, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/111896