Conference Presentation (Invited) PreJuSER-111896

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png
Atomic layer deposition of oxide thin films for non-volatile memory applications



2012

DPG Frühjahrstagung
Seminar, BerlinBerlin, 25 Mar 20122012-03-25


Note: Record converted from VDB: 16.11.2012

Contributing Institute(s):
  1. Elektronische Materialien (PGI-7)
  2. Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)
Research Program(s):
  1. Grundlagen für zukünftige Informationstechnologien (P42)

Appears in the scientific report 2012
Click to display QR Code for this record

The record appears in these collections:
Document types > Presentations > Conference Presentations
JARA > JARA > JARA-JARA\-FIT
Institute Collections > PGI > PGI-7
Workflow collections > Public records
Publications database

 Record created 2012-11-16, last modified 2018-02-11



Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)