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@INPROCEEDINGS{HoffmannEifert:111896,
      author       = {Hoffmann-Eifert, S.},
      title        = {{A}tomic layer deposition of oxide thin films for
                      non-volatile memory applications},
      reportid     = {PreJuSER-111896},
      year         = {2012},
      note         = {Record converted from VDB: 16.11.2012},
      comment      = {DPG Frühjahrstagung},
      booktitle     = {DPG Frühjahrstagung},
      month         = {Mar},
      date          = {2012-03-25},
      organization  = {Berlin, 25 Mar 2012},
      subtyp        = {Invited},
      cin          = {JARA-FIT / PGI-7},
      cid          = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-7-20110106},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/111896},
}