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@INPROCEEDINGS{Reiner:111900,
author = {Reiner, M. and Aslam, N. and Hoffmann-Eifert, S. and Waser,
R.},
title = {{A}tomic layer deposition of {T}i{O}2 by {TDMAT} and
{H}2{O} for resistive switching applications},
reportid = {PreJuSER-111900},
year = {2012},
note = {Record converted from VDB: 16.11.2012},
comment = {Novel High-k Application Workshop},
booktitle = {Novel High-k Application Workshop},
month = {Jan},
date = {2012-01-24},
organization = {Dresden, 24 Jan 2012},
cin = {PGI-7 / JARA-FIT},
cid = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
typ = {PUB:(DE-HGF)6},
url = {https://juser.fz-juelich.de/record/111900},
}