%0 Conference Paper
%A Zhao, Q.T.
%A Knoll, L.
%A Zhang, B.
%A Buca, D.
%A Hartmann, J.-M.
%A Mantl, S.
%T Ultrathin epitaxial Ni-silicide contacs on Si and SiGe: Structural and electrical investigation
%M PreJuSER-112048
%D 2012
%Z Record converted from VDB: 16.11.2012
%< Materials for Advanced Metallization (MAM2012)
Y2 11 Mar 2012
M2 Grenoble, France, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/112048