Conference Presentation (Invited)

PreJuSER-112048

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Ultrathin epitaxial Ni-silicide contacs on Si and SiGe: Structural and electrical investigation

Zhao, Q. T.FZJ* ; Knoll, L.FZJ* ; Zhang, B.FZJ* ; Buca, D.FZJ* ; Hartmann, J.-M. ; Mantl, S.FZJ*

2012

Note: Record converted from VDB: 16.11.2012

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Contributing Institute(s):

1. Halbleiter-Nanoelektronik (PGI-9)
2. Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)

Research Program(s):

1. Grundlagen für zukünftige Informationstechnologien (P42)

Appears in the scientific report 2012

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