TY  - CONF
AU  - Zhao, Q.T.
AU  - Knoll, L.
AU  - Zhang, B.
AU  - Buca, D.
AU  - Hartmann, J.-M.
AU  - Mantl, S.
TI  - Ultrathin epitaxial Ni-silicide contacs on Si and SiGe: Structural and electrical investigation
M1  - PreJuSER-112048
PY  - 2012
N1  - Record converted from VDB: 16.11.2012
Y2  - 11 Mar 2012
M2  - Grenoble, France, 
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/112048
ER  -