http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png
Strained-SiGe p-MOSFET with LaLuO3 as hihg-k gate dielectric and TiN as metal gate
Yu, W.FZJ* ; Zhang, B.FZJ* ; Zhao, Q. T.FZJ* ; Hartmann, J.-M. ; Buca, D.FZJ* ; Nichau, A.FZJ* ; Durgun Özben, E.FZJ* ; Lopes, J. M. J.FZJ* ; Schubert, J.FZJ* ; Ghyselen, B. ; Mantl, S.FZJ*
2010
2010Proceedings of 6th Workshop of the thematic Network on Silicon-on-Insulator Technology (EUROSOI). - 2010. S. 25 - 26
Note: Record converted from VDB: 12.11.2012
Contributing Institute(s):
- Halbleiter-Nanoelektronik (IBN-1)
- Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)
Research Program(s):
- Grundlagen für zukünftige Informationstechnologien (P42)
Appears in the scientific report
2010
Notes: Proceedings