%0 Conference Paper
%A Knoll, L.
%A Zhao, Q. T.
%A Urban, C.
%A Habicht, S.
%A Fox, A.
%A Mantl, S.
%T Formation and characterization of Ultra-Thin NiSi, Ni1-xPtxSi and epitaxial NiSi2on Si(001) substrates
%M PreJuSER-11479
%D 2010
%Z Record converted from VDB: 12.11.2012
%< Materials for Advanced Metallization (MAM) Conference
Y2 7 Mar 2010
M2 Mechelen, Belgium, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/11479