%0 Conference Paper
%A Durgun Özben, E.
%A Lopes, J. M. J.
%A Roeckerath, M.
%A Nichau, A.
%A Luptak, R.
%A Lenk, S.
%A Besmehn, A.
%A Ghyselen, B.
%A Zhao, Q. T.
%A Schubert, J.
%A Mantl, S.
%T High mobility strained SOI MOSFETs with LaScO3/TiN gate stacks fabricated with a replacement gate process
%M PreJuSER-11561
%D 2010
%Z Record converted from VDB: 12.11.2012
%< 11thb International Conference on Ultimate Integratuin on Silicon (ULIS)
Y2 18 Mar 2010
M2 Glasgow, Scotland, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/11561