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@INPROCEEDINGS{Durgunzben:11561,
      author       = {Durgun Özben, E. and Lopes, J. M. J. and Roeckerath, M.
                      and Nichau, A. and Luptak, R. and Lenk, S. and Besmehn, A.
                      and Ghyselen, B. and Zhao, Q. T. and Schubert, J. and Mantl,
                      S.},
      title        = {{H}igh mobility strained {SOI} {MOSFET}s with
                      {L}a{S}c{O}3/{T}i{N} gate stacks fabricated with a
                      replacement gate process},
      reportid     = {PreJuSER-11561},
      year         = {2010},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {11thb International Conference on Ultimate Integratuin on
                      Silicon (ULIS)},
      booktitle     = {11thb International Conference on
                       Ultimate Integratuin on Silicon (ULIS)},
      month         = {Mar},
      date          = {2010-03-18},
      organization  = {Glasgow, Scotland, 18 Mar 2010},
      cin          = {IBN-1 / JARA-FIT},
      cid          = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/11561},
}