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000012075 084__ $$2WoS$$aNanoscience & Nanotechnology
000012075 084__ $$2WoS$$aMaterials Science, Multidisciplinary
000012075 084__ $$2WoS$$aPhysics, Applied
000012075 1001_ $$0P:(DE-HGF)0$$aSkorb, E.V.$$b0
000012075 245__ $$aTitania-assisted electron-beam and synchrotron lithography
000012075 260__ $$aBristol$$bIOP Publ.$$c2010
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000012075 500__ $$aThis work was supported by the Humboldt Foundation and the NATO Collaboration Linkage grant. EV thanks Dr Dmitry Shchukin for helpful discussion.
000012075 520__ $$aNovel imaging layer technology for electron-beam and extreme-ultraviolet lithographic processes based upon generation of Pd nanoparticles in the Pd(2+)-loaded TiO(2) films was developed. The electroless metallization of the patterned TiO(2):Pd(2+) films yields both negative and positive nickel images with resolution down to approximately 100 nm.
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000012075 7001_ $$0P:(DE-HGF)0$$aDais, C.$$b2
000012075 7001_ $$0P:(DE-HGF)0$$aGuzenko, V.A.$$b3
000012075 7001_ $$0P:(DE-HGF)0$$aSokolov, V.G.$$b4
000012075 7001_ $$0P:(DE-HGF)0$$aGaevskaya, T.V.$$b5
000012075 7001_ $$0P:(DE-HGF)0$$aSviridov, D.V.$$b6
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