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@ARTICLE{Skorb:12075,
      author       = {Skorb, E.V. and Grützmacher, D. and Dais, C. and Guzenko,
                      V.A. and Sokolov, V.G. and Gaevskaya, T.V. and Sviridov,
                      D.V.},
      title        = {{T}itania-assisted electron-beam and synchrotron
                      lithography},
      journal      = {Nanotechnology},
      volume       = {21},
      issn         = {0957-4484},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {PreJuSER-12075},
      pages        = {315301},
      year         = {2010},
      note         = {This work was supported by the Humboldt Foundation and the
                      NATO Collaboration Linkage grant. EV thanks Dr Dmitry
                      Shchukin for helpful discussion.},
      abstract     = {Novel imaging layer technology for electron-beam and
                      extreme-ultraviolet lithographic processes based upon
                      generation of Pd nanoparticles in the Pd(2+)-loaded TiO(2)
                      films was developed. The electroless metallization of the
                      patterned TiO(2):Pd(2+) films yields both negative and
                      positive nickel images with resolution down to approximately
                      100 nm.},
      keywords     = {J (WoSType)},
      cin          = {IBN-1 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      shelfmark    = {Nanoscience $\&$ Nanotechnology / Materials Science,
                      Multidisciplinary / Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:20634573},
      UT           = {WOS:000279961200010},
      doi          = {10.1088/0957-4484/21/31/315301},
      url          = {https://juser.fz-juelich.de/record/12075},
}