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@INPROCEEDINGS{Minamisawa:12107,
author = {Minamisawa, R. A. and Habicht, S. and Knoll, L. and Feste,
S. F. and Zhao, Q. T. and Kernevez, N. and Bourdelle, K.K.},
title = {{F}rom strained {SOI} layers to s{S}i {NW}: stress and
electrical characterization},
reportid = {PreJuSER-12107},
year = {2010},
note = {Record converted from VDB: 12.11.2012},
comment = {5th International SiGe Technology and Device Meeting
(ISTDm2010)},
booktitle = {5th International SiGe Technology and
Device Meeting (ISTDm2010)},
month = {May},
date = {2010-05-24},
organization = {Stockholm, Schweden, 24 May 2010},
cin = {IBN-1 / JARA-FIT},
cid = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
typ = {PUB:(DE-HGF)31},
url = {https://juser.fz-juelich.de/record/12107},
}