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From strained SOI layers to sSi NW: stress and electrical characterization
Minamisawa, R. A.FZJ* ; Habicht, S.FZJ* ; Knoll, L.FZJ* ; Feste, S. F.FZJ* ; Zhao, Q. T.FZJ* ; Kernevez, N. ; Bourdelle, K. K.
2010
20105th International SiGe Technology and Device Meeting (ISTDm2010)
Seminar, Stockholm, SchwedenStockholm, Schweden, 24 May 20102010-05-24
Note: Record converted from VDB: 12.11.2012
Contributing Institute(s):
- Halbleiter-Nanoelektronik (IBN-1)
- Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)
Research Program(s):
- Grundlagen für zukünftige Informationstechnologien (P42)
Appears in the scientific report
2010