%0 Conference Paper
%A Moers, Jürgen
%A Trellenkamp, Stefan
%A Rienks, Bert
%T Marker process for high overlay accuracy e-beam lithography
%M FZJ-2012-00155
%D 2012
%B DPG-Spring Meeting
%C 25 Mar 2012 - 30 Mar 2012, Berlin (Germany)
Y2 25 Mar 2012 - 30 Mar 2012
M2 Berlin, Germany
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/127088